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DeCS
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Descriptor English:
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Micro-Electrical-Mechanical Systems
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Descriptor Spanish:
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Sistemas Microelectromecánicos
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Descriptor Portuguese:
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Sistemas Microeletromecânicos
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Synonyms English:
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BioMEMS
MEMS
Micro Electrical Mechanical Systems
Micro Electro Mechanical Systems
Micro-Electrical-Mechanical System
Micro-Electro-Mechanical System
Micro-Electro-Mechanical Systems
System, Micro-Electrical-Mechanical
System, Micro-Electro-Mechanical
Systems, Micro-Electrical-Mechanical
Systems, Micro-Electro-Mechanical
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Tree Number:
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E07.305.343
J01.637.509
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Definition English:
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A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. |
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History Note English:
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2009
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Allowable Qualifiers English:
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Record Number:
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53255
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Unique Identifier:
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D055617
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Occurrence in VHL:
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Similar:
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DeCS
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